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Prof.M.Moorthy Muthukrishnan
ELECTRICAL/
Professor
moorthy@bits-hyderabad.ac.in


Qualification

1.Ph.D. E.E. (Virginia Tech, Blacksburg, Virginia, USA. Nov. ‘96) GPA 3.33/4.0

2.M.S. E.E. (Virginia Tech, Blacksburg, Virginia, USA. Dec. ‘89) GPA 3.67/4.0

3.M.Tech. E.E. (Indian Institute of Technology, Madras, India, Jan.‘85) GPA 9.2/10

4.B.Engg. (Hons) E.C.E. (PSG Tech, Coimbatore, India, May ‘83) GPA 85.9%

Recent Publications

1. N. shivaprasad, B. Prabhakar, N. Moorthy Muthukrishnan, “Programmable Avionics Serial Data Bus Implementation”, presented at International Conference on Computational Methods in Engineering Sciences, CBIT, Hyderabad, India on 8 to 10 January 2009.

2. “Assessing Polysilicon Linewidth Variation Using Statistical Metrology”, Presented at International conference on Characterization and Metrology for ULSI Technology, Gaithersburg, MD, March ’98.

3. N. Moorthy Muthukrishnan, Sharad Prasad, Brian Stine, William Loh, Ron Nagahara, James E. Chung, Duane S. Boning, “Evaluation of pad life in chemical mechanical polishing process using statistical metrology”, Proceedings Vol. 3216, SPIE. Pp 70-79, Austin, TX, September ’97.

4. N. Moorthy Muthukrishnan, Kostas Amberiadis, Aicha Elshabini-Riad, “Etch Characteristics of Ti in Cl2/N2 and TiN in Cl2/N2/BCl3 plasmas by response surface methodology”, Proceedings Vol 3507, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV, pp 165-174, September 1998.

5. N. Moorthy Muthukrishnan, Kostas Amberiadis, Aicha Elshabini-Riad, “Characterization of Ti Etching in Cl2/N2 Plasmas”, Journal of Electrochemical Society, Vol 144, Issue 5, pp 1780-1784, May 1997..

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